Gettering and Defect Engineering in Semiconductor Technology - GADEST 2003; proceedings of the 10th International Autumn Meeting; Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003
- Författare
- Martin Kittler H. Richter Germany) International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" 2003 : Seehotel Zeuthen
- (Edited by H. Richter and M. Kittler.)
- Genre
- Ej skönlitteratur, Konferenser, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| SciTech Publications, Trans Tech distributor | c2004 | Schweiz, Uetikon-Zürich, Switzerland, Enfield, N.H., USA | xvi, 682 sidor illustrationer 25 cm. | 978-3-908450-82-5 |